Vacuum UltraViolet Lighting System

  • Mercury-free 172nm UV lamp for testing & evaluation:
  • Highly effective removal of VOCs in high purity water applications

Semiconductor production

Surface modification

Surface cleaning

Microfluidic bonding

Photoresist etching

High levels of ozone creation

  • 10cm X 10cm X 5mm with proprietary electronic power supply
  • Other sizes and shapes available on request


Full Specification Documents
  • No Mercury
  • No Lead
  • High Output > 100mW/cm² front side
  • Instant on / off
  • Uniform output across lamp face
  • Flat & thin: 5mm thick
  • Full dimming
  • Electronic power supply with universal input: 100 – 260V / 50 – 60Hz
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